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Dependence of thin-oxide films quality on surface microroughness

✍ Scribed by Ohmi, T.; Miyashita, M.; Itano, M.; Imaoka, T.; Kawanabe, I.

Book ID
114534507
Publisher
IEEE
Year
1992
Tongue
English
Weight
913 KB
Volume
39
Category
Article
ISSN
0018-9383

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