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Dependence of the vacuum ring coating profile on the flow modulator structure

✍ Scribed by V. A. Martsinovskii; S. O. Mirumyants; M. Kh. Akhmadeev

Publisher: Springer US
Year: 1983
Tongue: English
Weight: 374 KB
Volume: 38
Category: Article
ISSN: 0021-9037
DOI: 10.1007/bf00658801

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