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Dependence of the emission and absorption spectra of a laser plasma in the vacuum ultraviolet on the target surface relief

โœ Scribed by G. S. Antonov; L. I. Kiselevskii

Publisher
Springer US
Year
1977
Tongue
English
Weight
505 KB
Volume
26
Category
Article
ISSN
0021-9037

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## Abstract The gasโ€phase reaction products of silacyclobutane (SCB) and 1, 1โ€dideuterioโ€silacyclobutane (SCBโ€__d__~2~) from a hotโ€wire chemical vapor deposition (HWCVD) chamber were diagnosed __in situ__ using vacuum ultraviolet (VUV) laser singleโ€photon ionization (SPI) coupled with timeโ€ofโ€fligh