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Dependence of the activity efficiency of Mg-implanted into GaAs on the concentration of As doped into a-Si:H encapsulants

✍ Scribed by Katsuhiro Yokota; Masanori Sakaguchi; Hiroki Inohara; Hiromi Nakanishi; Susumu Tamura; Yuuji Horino; Akiyoshi Chayahara; Mamoru Satho; Kiyohito Hirai; Hiromichi Takano; Mashao Kumagaya


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
653 KB
Volume
37
Category
Article
ISSN
0038-1101

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