Dependence of surface smoothing, sputtering and etching phenomena on cluster ion dosage

✍ Scribed by Jae-Hoon Song; Duck-Kyun Choi; Won-Kook Choi

• Book ID: 114166139
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 375 KB
• Volume: 196
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(02)01295-8