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Dependence of selective anodization characteristics on silicon substrate orientation

โœ Scribed by S. Uehara; K. Kubota; K. Nagaoka; S. Yoshida; T. Matsubara


Publisher
John Wiley and Sons
Year
2005
Tongue
English
Weight
360 KB
Volume
2
Category
Article
ISSN
1862-6351

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