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Dependence of electrical and mechanical durability on Zn content and heat treatment for co-sputtered ITZO films

✍ Scribed by Kwon, Sae hee; Jung, Jae heon; Cheong, Woo seok; Lee, Gun hwan; Song, Pung keun


Book ID
122497847
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
834 KB
Volume
12
Category
Article
ISSN
1567-1739

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