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Density functional study of the stability and electronic properties of TaxNy compounds used as copper diffusion barriers

✍ Scribed by P. Violet; E. Blanquet; O. Le Bacq


Book ID
108207657
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
381 KB
Volume
83
Category
Article
ISSN
0167-9317

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