✦ LIBER ✦
Density functional study of initial HfCl4 adsorption and decomposition reactions on silicon surfaces with SiON interfacial layer
✍ Scribed by Jie Ren; Bao Sun; David Wei Zhang
- Book ID
- 103819016
- Publisher
- Elsevier Science
- Year
- 2007
- Tongue
- English
- Weight
- 948 KB
- Volume
- 253
- Category
- Article
- ISSN
- 0169-4332
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