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Densification of Sol-Gel Thin Films by Ultraviolet and Vacuum Ultraviolet Irradiations

✍ Scribed by Hiroaki Imai; Koichi Awazu; Masarux Yasumori; Hideo Onuki; Hiroshi Hirashima


Book ID
111561632
Publisher
Springer
Year
1997
Tongue
English
Weight
72 KB
Volume
8
Category
Article
ISSN
0928-0707

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## Abstract Nitrogen‐rich organic thin films were deposited by VUV‐assisted photochemical polymerisation of flowing C~2~H~4~/NH~3~ mixtures. The fundamental reaction mechanisms of these binary gas mixtures were investigated as a function of the wavelength of two almost monochromatic VUV sources. Co