Dense Self-Assembly on Sparse Chemical Patterns: Rectifying and Multiplying Lithographic Patterns Using Block Copolymers

✍ Scribed by Joy Y. Cheng; Charles T. Rettner; Daniel P. Sanders; Ho-Cheol Kim; William D. Hinsberg

• Book ID: 102688922
• Publisher: John Wiley and Sons
• Year: 2008
• Tongue: English
• Weight: 813 KB
• Volume: 20
• Category: Article
• ISSN: 0935-9648
• DOI: 10.1002/adma.200800826