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Demonstration of Nanomachining With Focused Extreme Ultraviolet Laser Beams

✍ Scribed by Bravo, H.; Szapiro, B.T.; Wachulak, P.W.; Marconi, M.C.; Weilun Chao; Anderson, E.H.; Menoni, C.S.; Rocca, J.J.

Book ID: 114571229
Publisher: IEEE
Year: 2012
Tongue: English
Weight: 600 KB
Volume: 18
Category: Article
ISSN: 1077-260X
DOI: 10.1109/jstqe.2011.2158392

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