Demonstration of intricate gate, Ohmic and interconnect metallizations for nanostructure construction

✍ Scribed by Y. Feng; R.P. Taylor; P.T. Coleridge; A.S. Sachrajda; M. Davies; P. Zawadzki; J. McCaffrey

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 352 KB
• Volume: 15
• Category: Article
• ISSN: 0749-6036
• DOI: 10.1006/spmi.1994.1017