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Demonstrating Valence Band-Edge Effective Work Function by Aluminum Implantation in High-k/Metal Gatep-MOSFET with Incorporated Fluorine

✍ Scribed by Y.W. Chen, C.M. Lai, L.W. Cheng, C.H. Hsu, C.W. Liang


Book ID
113087313
Publisher
Springer US
Year
2012
Tongue
English
Weight
456 KB
Volume
41
Category
Article
ISSN
0361-5235

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