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Demagnifying high-resolution imaging based on a new system for nanolithography

✍ Scribed by Qingqing Meng; Xiaoping Zhang; Lin Cheng; Pengfei Cao; Yuee Li; Xin Jin

Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
988 KB
Volume
284
Category
Article
ISSN
0030-4018

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