✦ LIBER ✦
Degree of dissociation measured by FTIR absorption spectroscopy applied to VHF silane plasmas
✍ Scribed by Sansonnens, L; Howling, A A; Hollenstein, Ch
- Book ID
- 120311295
- Publisher
- Institute of Physics
- Year
- 1998
- Tongue
- English
- Weight
- 147 KB
- Volume
- 7
- Category
- Article
- ISSN
- 0963-0252
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