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Degradation of polyimide by 100 keV He+, Ne+, Ar+ and Kr+ ions

✍ Scribed by V Hnatowicz; V Peřina; A Macková; V Švorčı́k; V Rybka; D Fink; J Heitz

Book ID: 114164490
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 95 KB
Volume: 175-177
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(00)00557-7

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