Degradation of oxide films due to radiation effects in exposure to plasmas in sputter deposition and backsputtering : Daniel V. McCaughan and Richard A. Kushner. Proc. IEEE62. (9) Sept. 1974. p. 1236

• Publisher: Elsevier Science
• Year: 1975
• Tongue: English
• Weight: 138 KB
• Volume: 14
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(75)90629-0