✦ LIBER ✦
Degradation of doped Si regious contacted with transition metal silicides due to metal-dopant compound formation
✍ Scribed by K. Maex; G. Ghosh; L. Delaey; R. De Keersmaecker
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 60 KB
- Volume
- 38
- Category
- Article
- ISSN
- 0169-4332
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