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Degradation and silicidation of Ta- and W-filaments for different filament temperatures

✍ Scribed by N. Kniffler; A. Pflueger; D. Scheller; B. Schroeder

Book ID: 108290358
Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 456 KB
Volume: 517
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2009.01.025

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