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Deformation behavior during nanoindentation of epitaxial ZnO thin films on sapphire substrate

✍ Scribed by R. Navamathavan; Kyoung-Kook Kim; Dae-Kue Hwang; Seong-Ju Park; Tae Geol Lee; Gwang-Seok Kim; Jun-Hee Hahn

Book ID
113790535
Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
404 KB
Volume
61
Category
Article
ISSN
0167-577X

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The role of strain hardening for the deformation of thin Cu films was investigated quantitatively by conducting specialized tensile testing allowing the simultaneous characterization of the film stress and the dislocation density as a function of plastic strain. The stress-strain behavior was studie