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Deflection detection and feedback actuation using a self‐excited piezoelectric Pb(Zr,Ti)O3 microcantilever for dynamic scanning force microscopy
✍ Scribed by Itoh, T.; Lee, C.; Suga, T.
- Book ID
- 111690426
- Publisher
- American Institute of Physics
- Year
- 1996
- Tongue
- English
- Weight
- 320 KB
- Volume
- 69
- Category
- Article
- ISSN
- 0003-6951
- DOI
- 10.1063/1.116871
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