✦ LIBER ✦
Defects in high-dose oxygen implanted silicon: a TEM study : A. De Veirman and J. Van Landuyt, J. Vanhellemont, H. E. Maes and K. Yallup. Vacuum42(5/6), 367 (1991)
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 90 KB
- Volume
- 31
- Category
- Article
- ISSN
- 0026-2714
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