Defects Due to Metal Silicide Precipitation in Microelectronic Device Manufacturing: The Unlovely Face of Transition Metal Silicides

✍ Scribed by B.O. Kolbesen; H. Cerva

• Publisher: John Wiley and Sons
• Year: 2000
• Tongue: English
• Weight: 421 KB
• Volume: 222
• Category: Article
• ISSN: 0370-1972
• DOI: 10.1002/1521-3951(200011)222:1<303::aid-pssb303>3.0.co;2-h