Defect suppression of indium end-of-range during solid phase epitaxy annealing using Si1−yCy in silicon

✍ Scribed by Chung Foong Tan; Eng Fong Chor; Hyeokjae Lee; Jinping Liu; Elgin Quek; Lap Chan

• Book ID: 108289176
• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 254 KB
• Volume: 504
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2005.09.157