Defect study on Nanoglass® E porous ultra-low k material (k∼2.2) for ultra-large-scale integration applications

✍ Scribed by L. Zhang; Y.W. Chen; C.Y. Li; C. Li; L.Y. Wong; H.Y. Li; S. Balakumar; H.S. Park

• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 359 KB
• Volume: 7
• Category: Article
• ISSN: 1369-8001
• DOI: 10.1016/j.mssp.2004.05.005