Defect Recovery in AlN and InN after Heavy Ion Implantation

✍ Scribed by K. Lorenz; R. Vianden

• Publisher: John Wiley and Sons
• Year: 2003
• Tongue: English
• Weight: 188 KB
• Volume: 0
• Category: Article
• ISSN: 1862-6351
• DOI: 10.1002/pssc.200390076