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Defect production during the fabrication of SOI by oxygen ion implantation

✍ Scribed by R.C. Barklie; T.J. Ennis; K. Reeson; P.L.F. Hemment

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 464 KB
Volume: 36
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(89)90935-5

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