Defect monitoring using scanning photoluminescence spectroscopy in multicrystalline silicon wafers

✍ Scribed by Ostapenko, S; Tarasov, I; Kalejs, J P; Haessler, C; Reisner, E-U

• Book ID: 121467931
• Publisher: Institute of Physics
• Year: 2000
• Tongue: English
• Weight: 538 KB
• Volume: 15
• Category: Article
• ISSN: 0268-1242
• DOI: 10.1088/0268-1242/15/8/310