Defect metastability associated with oxygen and nitrogen impurity atoms in hydrogenated amorphous silicon films

✍ Scribed by G. Lucovsky; Z. Jing

• Book ID: 115990885
• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 501 KB
• Volume: 198-200
• Category: Article
• ISSN: 0022-3093
• DOI: 10.1016/0022-3093(95)00700-8