Defect-initiated atomic emissions from semiconductor surfaces induced by laser irradiation: electronic cleaning of defects on surfaces

✍ Scribed by Jun'ichi Kanasaki; Akiko Okano; Yasuo Nakai; Noriaki Itoh

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 289 KB
• Volume: 79-80
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(94)90395-6