✦ LIBER ✦
Defect engineering as an important factor in developing VLSI substrates
✍ Scribed by H. Richter; M. Mai; F-G. Kirscht; P. Gaworzewski
- Publisher
- Elsevier Science
- Year
- 1983
- Weight
- 511 KB
- Volume
- 116
- Category
- Article
- ISSN
- 0378-4363
No coin nor oath required. For personal study only.