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Defect detection of IC wafer based on two-dimension wavelet transform

✍ Scribed by Hongxia Liu; Wen Zhou; Qianwei Kuang; Lei Cao; Bo Gao

Publisher: Elsevier Science
Year: 2010
Tongue: English
Weight: 540 KB
Volume: 41
Category: Article
ISSN: 0026-2692
DOI: 10.1016/j.mejo.2010.01.015

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