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Defect annealing processes for polycrystalline silicon thin-film solar cells

✍ Scribed by Steffens, S.; Becker, C.; Zollondz, J.-H.; Chowdhury, A.; Slaoui, A.; Lindekugel, S.; Schubert, U.; Evans, R.; Rech, B.

Book ID
122752912
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
740 KB
Volume
178
Category
Article
ISSN
0921-5107

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## Abstract Thin‐film polycrystalline silicon solar cells have been fabricated on various substrates, such as inactive P^++^ mono‐crystalline silicon substrates, p^++^ mono‐Si substrates covered by thermally oxidized SiO~2~ and ceramic substrates by means of a rapid thermal chemical vapour depositi