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Defect and stress characterization of AlN films by Raman spectroscopy

✍ Scribed by Lughi, Vanni; Clarke, David R.

Book ID: 121686454
Publisher: American Institute of Physics
Year: 2006
Tongue: English
Weight: 330 KB
Volume: 89
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.2404938

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