Deep X-ray lithography at ELETTRA using a central beam-stop to enhance adhesion

✍ Scribed by F. Pérennès; E. Vesselli; F. J. Pantenburg

• Book ID: 106184476
• Publisher: Springer-Verlag
• Year: 2002
• Tongue: English
• Weight: 203 KB
• Volume: 8
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-001-0161-7