✦ LIBER ✦
Deep ultra-violet measurements of SiON anti-reflective coatings by spectroscopic ellipsometry
✍ Scribed by Christophe Defranoux; Jean-Philippe Piel; Jean-Louis Stehle
- Book ID
- 114086409
- Publisher
- Elsevier Science
- Year
- 1998
- Tongue
- English
- Weight
- 234 KB
- Volume
- 313-314
- Category
- Article
- ISSN
- 0040-6090
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