Deep Reactive Ion Etching of Lead Zirconate Titanate Using Sulfur Hexafluoride Gas

✍ Scribed by Shinan Wang; Xinghua Li; Katsuhiro Wakabayashi; Masayoshi Esashi

• Book ID: 110827783
• Publisher: John Wiley and Sons
• Year: 2004
• Tongue: English
• Weight: 224 KB
• Volume: 82
• Category: Article
• ISSN: 0002-7820
• DOI: 10.1111/j.1151-2916.1999.tb01919.x