✦ LIBER ✦
Deep lithography with protons: Modelling and predicting the performances of a novel fabrication technology for micro-optical components
✍ Scribed by Bart Volckaerts; Alex Hermanne; Irina Veretennicoff; Hugo Thienpont
- Book ID
- 114165925
- Publisher
- Elsevier Science
- Year
- 2002
- Tongue
- English
- Weight
- 146 KB
- Volume
- 193
- Category
- Article
- ISSN
- 0168-583X
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