✦ LIBER ✦
Deep lithography with a low energy synchrotron source: fabrication of X-ray refractive single lenses
✍ Scribed by Y. Zhang; T. Katoh; D. Amano
- Book ID
- 106184482
- Publisher
- Springer-Verlag
- Year
- 2002
- Tongue
- English
- Weight
- 138 KB
- Volume
- 8
- Category
- Article
- ISSN
- 0946-7076
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