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Deep Levels in Oxygenated n-Type High-Resistivity FZ Silicon before and after a Low-Temperature Hydrogenation Step

✍ Scribed by Simoen, E.; Claeys, C.; Job, R.; Ulyashin, A. G.; Fahrner, W. R.; Tonelli, G.; De Gryse, O.; Clauws, P.


Book ID
126317751
Publisher
The Electrochemical Society
Year
2003
Tongue
English
Weight
143 KB
Volume
150
Category
Article
ISSN
0013-4651

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