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Deep levels in n-type si substrates treated in O2 plasma

✍ Scribed by Simeonov, S. S. ;Szekeres, A. ;Kafedjiiska, E.

Book ID: 105383903
Publisher: John Wiley and Sons
Year: 1993
Tongue: English
Weight: 285 KB
Volume: 140
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.2211400134

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