๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Decoupling capacitor of substrate bias voltage on dynamic MOS RAM chip

โœ Scribed by Makoto Taniguchi; Michihiro Yamada; Masaki Kumanoya; Toshifumi Kobayashi; Takano Nakano


Book ID
112075191
Publisher
John Wiley and Sons
Year
1982
Tongue
English
Weight
508 KB
Volume
65
Category
Article
ISSN
8756-6621

No coin nor oath required. For personal study only.


๐Ÿ“œ SIMILAR VOLUMES


Influence of substrate bias voltage on s
โœ Seung Gyun Hong; Se-Hun Kwon; Sang-Won Kang; Kwang Ho Kim ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 563 KB

## Arc ion plating Magnetron sputtering Substrate bias voltage Cr-Mo-Si-N coatings were prepared on Si wafer by a hybrid coating system combining arc ion plating and magnetron sputtering at the substrate bias voltage ranging from 0 to -400 V. The results showed that the deposition rate, film micro