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Decomposition and polymerization of perfluorinated compounds in microwave-excited atmospheric pressure plasma

✍ Scribed by Nagai, M.; Hori, M.; Goto, T.


Book ID
127396289
Publisher
American Institute of Physics
Year
2005
Tongue
English
Weight
609 KB
Volume
97
Category
Article
ISSN
0021-8979

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Plasma polymerization of ethylene in an
✍ Kevin G. Donohoe; Theodore Wydeven πŸ“‚ Article πŸ“… 1979 πŸ› John Wiley and Sons 🌐 English βš– 981 KB

## Abstract The polymerization of ethylene in an atmospheric pressure‐pulsed discharge has been studied. Partial pressures of ethylene up to 4 kN/m^2^ were used with helium as a diluent. Deposition rates (on glass slides) were the same throughout the discharge volume over a wide range of operating