✦ LIBER ✦
Deceleration ion optical system for sputtering measurements between 50 and 500 eV as function of angle of incidence: H Liebl et al, Rev Sci Instrum, 58, 1987, 1830–1832
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 151 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0042-207X
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