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DC magnetron sputtering prepared AgC thin film anode for thin film lithium ion microbatteries

โœ Scribed by Y. Li; J.P. Tu; D.Q. Shi; X.H. Huang; H.M. Wu; Y.F. Yuan; X.B. Zhao

Book ID
116600854
Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
477 KB
Volume
436
Category
Article
ISSN
0925-8388

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โœ Xianjun Zhu; Zaiping Guo; Guodong Du; Peng Zhang; Huakun Liu ๐Ÿ“‚ Article ๐Ÿ“… 2010 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 410 KB

Thin films of lithium cobalt oxide were deposited on Pt or Pt/Ti/quartz glass substrates by radio frequency (RF) magnetron sputtering at the substrate temperatures from room temperature to 500 ยฐC. As the substrate temperature increased, the film structure changed from amorphous structure to crystall