✦ LIBER ✦
DC and RF characteristics of advanced MIM capacitors for MMIC's using ultra-thin remote-PECVD Si3N4 dielectric layers
✍ Scribed by Jae-Hak Lee; Dae-Hyun Kim; Yong-Soon Park; Myoung-Kyu Sohn; Kwang-Seok Seo
- Book ID
- 119789058
- Publisher
- IEEE
- Year
- 1999
- Tongue
- English
- Weight
- 77 KB
- Volume
- 9
- Category
- Article
- ISSN
- 1051-8207
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