✦ LIBER ✦
Damascene test structures for the evaluation of barrier layer performance against copper diffusion
✍ Scribed by P Motte; M Swaanen; J Torres; J.M Gilet; G Wyborn
- Publisher
- Elsevier Science
- Year
- 2001
- Tongue
- English
- Weight
- 350 KB
- Volume
- 55
- Category
- Article
- ISSN
- 0167-9317
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