✦ LIBER ✦
Damage removal and defect control in As ion implanted Si1−xGex epilayers during a high-temperature annealing process
✍ Scribed by L.-F Zou; S.E Acosta-Ortiz; L.E Regalado; LuXin Zou
- Book ID
- 114156037
- Publisher
- Elsevier Science
- Year
- 2000
- Tongue
- English
- Weight
- 186 KB
- Volume
- 51-52
- Category
- Article
- ISSN
- 0167-9317
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