Damage modes and mechanisms of SiGe films under prompt soft X-ray radiation

✍ Scribed by S.R Gyetvay; D.J Chang; R Muki

• Book ID: 107864276
• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 818 KB
• Volume: 223
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(93)90530-3